发明名称 |
Method for producing thin film bulk acoustic resonators (FBARs) with different frequencies on the same substrate by subtracting method and apparatus embodying the method |
摘要 |
A method for fabricating a resonator, and in particular, a thin film bulk acoustic resonator (FBAR), and a resonator embodying the method are disclosed. The resonator is fabricated on a substrate by fabricating a bottom electrode layer and a piezoelectric (PZ) layer over the bottom electrode layer. A selected portion of the PZ layer is partially etched. Then, a top electrode is fabricated over the selected portion of the PZ layer.
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申请公布号 |
US2002121498(A1) |
申请公布日期 |
2002.09.05 |
申请号 |
US20010799202 |
申请日期 |
2001.03.05 |
申请人 |
BRADLEY PAUL D.;RUBY RICHARD C.;LARSON JOHN D. |
发明人 |
BRADLEY PAUL D.;RUBY RICHARD C.;LARSON JOHN D. |
分类号 |
H01L41/22;H03H3/02;H03H3/04;H03H9/17;H03H9/56;H04R17/10;(IPC1-7):C23C14/34 |
主分类号 |
H01L41/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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