LCR EXTRACTION METHOD AND COMPUTER PROGRAM FOR PERFORMING LCR EXTRACTION IN LSI DESIGN PROCESS

摘要

The present invention relates to an LCR extraction method for extracting LCR values from layout data having wiring pattern data in a plurality of wiring layers. The method has the steps of: generating the LCR values, for a wiring pattern, based on the layout data; finding the pattern congestion level in an area of the wiring pattern; and correcting the LCR values, based on pattern fluctuation values depending on the pattern interval between the wiring pattern and an adjacent pattern. Pattern width fluctuations occur in manufacturing processes in conjunction with the finer miniaturization of layout data, wherefore the precision of extracted LCR values can be enhanced by subjecting the LCR values found from layout data to corrections corresponding to those pattern width fluctuations.