发明名称 Nanolithography methods and products therefor and produced thereby
摘要 In one aspect, a method of nanolithography is provided using a driving force to control the movement of a deposition compound from a scanning probe microscope tip to a substrate. Another aspect of the invention provides a tip for use in nanolithography having an internal cavity and an aperture restricting movement of a deposition compound from the tip to the substrate. The rate and extent of movement of the deposition compound through the aperture is controlled by a driving force.
申请公布号 US2002122873(A1) 申请公布日期 2002.09.05
申请号 US20020059593 申请日期 2002.01.28
申请人 MIRKIN CHAD A.;HONG SEUNGHUN;DRAVID VINAYAK P. 发明人 MIRKIN CHAD A.;HONG SEUNGHUN;DRAVID VINAYAK P.
分类号 B05D1/00;B05D1/18;B05D1/26;B82B3/00;G01Q70/16;G01Q80/00;G03F7/00;G03F7/16;(IPC1-7):A61L2/00;B05D5/00 主分类号 B05D1/00
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