发明名称 |
Nanolithography methods and products therefor and produced thereby |
摘要 |
In one aspect, a method of nanolithography is provided using a driving force to control the movement of a deposition compound from a scanning probe microscope tip to a substrate. Another aspect of the invention provides a tip for use in nanolithography having an internal cavity and an aperture restricting movement of a deposition compound from the tip to the substrate. The rate and extent of movement of the deposition compound through the aperture is controlled by a driving force.
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申请公布号 |
US2002122873(A1) |
申请公布日期 |
2002.09.05 |
申请号 |
US20020059593 |
申请日期 |
2002.01.28 |
申请人 |
MIRKIN CHAD A.;HONG SEUNGHUN;DRAVID VINAYAK P. |
发明人 |
MIRKIN CHAD A.;HONG SEUNGHUN;DRAVID VINAYAK P. |
分类号 |
B05D1/00;B05D1/18;B05D1/26;B82B3/00;G01Q70/16;G01Q80/00;G03F7/00;G03F7/16;(IPC1-7):A61L2/00;B05D5/00 |
主分类号 |
B05D1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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