发明名称 Semiconductor device and manufacturing method of semiconductor device
摘要 A semiconductor device, which is comprised of a copper wiring layer which is formed above a semiconductor substrate, a pad electrode layer which conducts electrically to the copper wiring layer and has an alloy, which contains copper and a metal whose oxidation tendency is higher than copper, formed to extend to the bottom surface, and an insulating protective film which has an opening extended to the pad electrode layer, is provided.
申请公布号 US2002121703(A1) 申请公布日期 2002.09.05
申请号 US20020084065 申请日期 2002.02.28
申请人 KABUSHI KAISHA TOSHIBA 发明人 TOYODA HIROSHI;NAKAO MITSUHIRO;HASUNUMA MASAHIKO;KANEKO HISASHI;SAKATA ATSUKO;KOMUKAI TOSHIAKI
分类号 H01L21/28;H01L21/60;H01L21/768;H01L23/485;H01L23/532;(IPC1-7):H01L29/40;H01L23/52;H01L23/48 主分类号 H01L21/28
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