Microactuator, method for making the same, and magnetic head unit and magnetic recording apparatus using the same

摘要

A microactuator has a first substrate, a second substrate, a first comb electrode having a plurality of first comb elements formed on an inner surface of the first substrate, a second comb electrode having a plurality of second comb elements formed on an inner surface of the second substrate, and a connecting film formed by partially removing an interlayer formed on the inner face of any one of the first substrate and the second substrate. The first substrate and the second substrate face each other with a distance and are movable with respect to each other. The first comb elements and the second comb elements are alternately disposed. Any one of the first electrode and the second electrode is bonded to the connecting film. This microactuator is preferably used in magnetic head units and magnetic recording apparatuses.