发明名称 Method of fabricating row lines of a field emission array and forming pixel openings therethrough by employing two masks
摘要 A method of fabricating row lines and pixel openings of a field emission array. The method employs only two masks. A first mask employed in the method includes apertures alignable between rows of pixels of the field emission array. Electrically conductive material and semiconductive material exposed through the apertures are removed to define the row lines of the field emission array. A passivation layer is then disposed over at least selected portions of the field emission array. Then a second mask, including apertures alignable over the pixel regions of the field emission array, is disposed over the passivation layer of the field emission array. Passivation material exposed through the apertures of the second mask is removed to define openings through the passivation layer and over the pixel regions of the field emission array. Conductive material exposed through the apertures of the second mask may then be removed to expose the underlying semiconductive grid and to further define the pixel openings.
申请公布号 US2002121850(A1) 申请公布日期 2002.09.05
申请号 US20020108973 申请日期 2002.03.28
申请人 DERRAA AMMAR 发明人 DERRAA AMMAR
分类号 H01J9/02;(IPC1-7):H01J1/02 主分类号 H01J9/02
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