| 摘要 |
Methods and apparatus are provided for precisely and repeatably positioning spray bar. In accordance with a first aspect, an apparatus is provided that includes (1) a spray bar having an alignment mark and one or more openings, the spray bar configured to output a fluid spray from the one or more openings; (2) a mounting device having an alignment mark, the mounting device configured to support the spray bar; and (3) a substrate support configured to support a substrate. The alignment mark of the spray bar and the alignment mark of the mounting device may be aligned so as to position a fluid spray output by the spray bar toward a substrate supported by the substrate support. Numerous other methods and apparatus also are provided.
|
