Device for coating substrates with an oxidic, especially superconducting material contains an evacuated coating chamber containing substrates arranged behind each other on a conveyor belt

摘要

Device for coating substrates with an oxidic, especially superconducting material contains an evacuated coating chamber (2) containing substrates (7j) arranged behind each other on a conveyor belt (9) which leads the substrates through a deposition region (6) of a deposition device (4).