发明名称 GROWTH METHOD FOR A CRYSTALLINE STRUCTURE
摘要 <p>The invention relates to a method for growing a crystalline structure on a substrate (16) that has an at least partially crystalline surface (40), using a source material (18) that contains at least one element that can be applied to the crystalline surface to from a crystalline structure, whereby the source material is provided in a solid state while the method is carried out and also has a surface extension that corresponds at least substantially to that of the substrate (16), being arranged in an opposite, parallel position thereto, whereby the source material (18) has a larger, effective surface on account of its porosity and/or surface structure than that of the substrate and whereby at least the source material is heated to a temperature below the melting point thereof.</p>
申请公布号 EP1133593(B1) 申请公布日期 2002.09.04
申请号 EP19990958012 申请日期 1999.11.09
申请人 BAYERISCHES ZENTRUM FUER ANGEWANDTE ENERGIEFORSCHUNG E.V. ZAE BAYERN 发明人 BRENDEL, ROLF;KUCHLER, GREGOR;ACKERMANN, JOERG;AUER, RICHARD
分类号 C30B25/02;C30B25/22;H01L21/20;H01L21/205;H01L31/0236;H01L31/18;(IPC1-7):C30B25/22 主分类号 C30B25/02
代理机构 代理人
主权项
地址