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发明名称
CLEANING APPARATUS AND CLEANING METHOD
摘要
申请公布号
EP0956952(B1)
申请公布日期
2002.09.04
申请号
EP19970922192
申请日期
1997.05.26
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人
SARASHINA, EIGO;TAKAHASHI, KEN;MASUI, MASUO;NAITO, TAKAO
分类号
B41F35/00;H05K3/12;H05K3/26;(IPC1-7):B41F35/00
主分类号
B41F35/00
代理机构
代理人
主权项
地址
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