发明名称 |
Electrochemical machining method and apparatus |
摘要 |
An electrochemical machining apparatus comprises a machining chamber for holding ultrapure water, a cathode/anode immersed in the ultrapure water held in the machining chamber, and a workpiece holding portion for holding a workpiece at a predetermined distance from the cathode/anode so that a surface, to be machined, of the workpiece is brought into contact with the ultrapure water. The electrochemical machining apparatus further comprises an anode/cathode contact brought into contact with the workpiece held by the workpiece holding portion so that the workpiece serves as an anode/cathode, a catalyst having a strongly basic anion exchange function or a strongly acidic cation exchange function, a power source for applying a voltage between the cathode/anode and the workpiece, and a moving mechanism for relatively moving the workpiece and the catalyst. The catalyst is disposed between the cathode/anode and the workpiece held by the workpiece holding portion. |
申请公布号 |
EP1170083(A3) |
申请公布日期 |
2002.09.04 |
申请号 |
EP20010116344 |
申请日期 |
2001.07.05 |
申请人 |
EBARA CORPORATION;MORI, YUZO |
发明人 |
MORI, YUZO;KOBATA, ITSUKI;SHIRAKASHI, MITSUHIKO;SAITO, TAKAYUKI;TOMA, YASUSHI |
分类号 |
B23H3/08 |
主分类号 |
B23H3/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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