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发明名称
Copper containing substituted phenylethylene precursor and synthesis method
摘要
申请公布号
EP1000948(B1)
申请公布日期
2002.09.04
申请号
EP19990308237
申请日期
1999.10.19
申请人
SHARP KABUSHIKI KAISHA
发明人
ZHUANG, WEI WEI;NGUYEN, TUE;CHARNESKI, LAWRENCE J.;EVANS, DAVID R.;HSU, SHENG TENG
分类号
C07C49/16;C07C15/44;C07F1/08;C23C16/18;H01L21/285;(IPC1-7):C07F1/08
主分类号
C07C49/16
代理机构
代理人
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