| 摘要 |
1286426 Coating semi-conductors with aluminium alloys SIEMENS A G 19 April 1971 [13 March 1970] 23685/71 Heading C7F [Also in Division H1] A semi-conductor is coated with an alloy of Al with Ag or Ti by applying to a surface of the semi-conductor a layer of an organic lacquer containing AgAlH 4 or Ti(AlH 4 ) 4 in suspension or solution, evaporating the lacquer solvent, and converting the lacquer layer into the Al alloy by thermal decomposition e.g. by heating to 200-300‹C. in an oxygen-argon atmosphere. The lacquer used may be a photo-sensitive lacquer or a nitrocellulose-ether-butylacetate lacquer. Parts of the lacquer layer may be removed by etching prior to the thermal decomposition step. The surfaces coated include SiO 2 , Al 2 O 3 , Si 3 N 4 and silicon. A final heating of 500‹C. ensures good adherence between the layer and the substrate. |
