| 摘要 |
<p>The present invention provides a disc valve capable of enhancing an adhesion force between a valve body and a diamond-like hard carbon film so as to maintain leak-free and stable sliding characteristics for an extended period of time. The disc valve of the present invention comprises two valve bodies which slide with each other, wherein at least one of the valve bodies is made of ceramics, and the surface of the valve body is coated with a diamond-like hard carbon (34) film through an intermediate layer comprising a Ti film (33a) and a Si film (33b) laminated in this order. <IMAGE></p> |
