Gas distribution plate,申请号US20000565150-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	Gas distribution plate
摘要	An apparatus for use in a substrate processing system. The apparatus is generally a fluid distribution plate comprising an inner disk and an outer ring. The fluid distribution plate has a plurality of openings for fluid distribution and at least one slot defined therein.
申请公布号	US6444040(B1)	申请公布日期	2002.09.03
申请号	US20000565150	申请日期	2000.05.05
申请人	APPLIED MATERIALS INC.	发明人	HERCHEN HARALD;PALAGASHVILI DAVID;LUBOMIRSKY DMITRY;SCHREIBER ALEX
分类号	C23C16/44;C23C16/455;H01L21/00;(IPC1-7):C23C16/00	主分类号	C23C16/44
代理机构		代理人
主权项
地址

您可能感兴趣的专利

WAFER STRUCTURE FOR ELECTRONIC INTEGRATED CIRCUIT MANUFACTURING

WAFER STRUCTURE FOR ELECTRONIC INTEGRATED CIRCUIT MANUFACTURING

METHOD AND APPARATUS FOR SIMULTANEOUSLY GENERATING MULTI-TYPE MAGNETIC RESONANCE IMAGES

AVOCADO PITTING DEVICE

INTERMEDIATES FOR THE PREPARATION OF 2-IMIDAZOLINE-5-ONES

Oil separator for separating oil from crank case ventilation gas containing spray oil, has separator portions arranged in housing, where recess is formed in bottom wall of housing at position between separator portions

Base plate for raised flooring system used in office building, has control device for adjusting heating or cooling performance of base plate by change of volume flow of heating/cooling medium using heat exchanger

Method for programming control device of motor car, involves transferring difference data packet with difference data quantity to control device, where difference data quantity is partial quantity of another data quantity

Method for configuring digital imaging and communications in medicine (DICOM) apparatus e.g. MRI scanner in e.g. Ethernet, involves configuring DICOM apparatus with detected configuration parameters of another DICOM apparatus

Lighting device e.g. side marker light for vehicle, has transparent optical component that is arranged between reflector and light-transmitting cover

Potential distribution arrangement for providing two various electric potentials for motor car, has potential rails that include primary longitudinal portion merged into secondary longitudinal portion by transition portion

Steering column for motor vehicle, has damping device damping pivoting movement of operating lever about pivot axis, where damping device is arranged on side of support part opposite to operating lever

Connection unit for fastening steel conductor i.e. high pressure conductor, to component i.e. damping element, in coupling system i.e. hydraulic coupling system, of motor vehicle, has friction element pressed between housing and conductor

Suspension assembly for supporting vibrating unit relative to supporting structure in body assembly of motor vehicle, comprises a damping device that damps the relative movement of suspension assembly along a specific direction

Aircraft, has profiled blades rotatably arranged in rollers, so that profiled blades oscillate same as wing of flying bird, where rollers are attached such that rollers extend over tip of blades and brought into position by guide rails

Method for automatically backward- or afterward comparison of flow velocities on basis of contrast intensity curves, involves digital signature algorithm-acquisition of angiography scene under contrast agent tolerance in vessel section

Alloy, preferably aluminum casting alloy, useful e.g. as a sand or die casting alloy, comprises a specified range of silicon, zinc, iron, copper, magnesium, strontium, sodium, antimony and aluminum

Additive borating system for nuclear reactor plant i.e. pressurized water reactor, has borated coolant supplies releasable and usable by additive pipeline arrangements and borating pumps of pipeline network

Method for producing e.g. e.g. instrument panel, of carrier element, involves inserting foil blank in mold part, applying layer of varnish on portion of mold surface of mold part, and de-molding molded plastic part from mold part