| 发明名称 |
Conductive biasing member for metal layering |
| 摘要 |
A contact ring applies electroplating to a substrate having an electrically conductive portion. The contact ring comprises an annular insulative body, a conductive biasing member, and a seal member. The annular insulative body defines a central opening. The conductive biasing member is configured to exert a biasing force upon the substrate.
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| 申请公布号 |
US6444101(B1) |
申请公布日期 |
2002.09.03 |
| 申请号 |
US19990439294 |
申请日期 |
1999.11.12 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
STEVENS JOSEPH;COWAN NORMAN;TZOU CHIEN-SHIEN |
| 分类号 |
H01L21/28;C25D7/12;C25D17/06;H01L21/288;(IPC1-7):C25D17/00 |
主分类号 |
H01L21/28 |
| 代理机构 |
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