发明名称 Semiconductor capacitor device
摘要 A semiconductor device comprising: a first interconnect layer 1 comprising a first electrode 10 and a second electrode 20 with a plurality of a tooth-shaped teeth 11, 21 and a connection portion 12, 22 for connecting the plurality of teeth, the first electrode 10 and the second electrode 20 being disposed in a mutually staggered fashion from opposite directions; a second interconnect layer 2 comprising a third electrode 30 and a fourth electrode 40 with a plurality of tooth-shaped teeth 31, 41 and a connection portion 32, 42 for connecting the plurality of teeth, the third electrode 30 and the fourth electrode 40 being disposed in mutually staggered fashion from opposite directions; wherein the teeth 11 of the first electrode 10 overlap with either teeth 31 of the third electrode 30 or teeth 41 of the fourth electrode 40, and the electrodes are connected so that potentials on the overlapping teeth are different.
申请公布号 US6445056(B2) 申请公布日期 2002.09.03
申请号 US20010755862 申请日期 2001.01.05
申请人 NEC CORPORATION 发明人 NAKASHIMA YUUJI
分类号 H01L27/04;H01L21/822;H01L23/482;(IPC1-7):H01L29/00;H01L29/40;H01L29/92 主分类号 H01L27/04
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