| 摘要 |
<p>PURPOSE: To automatically decide each equipment operation parameter in real time and corresponding to the past processing contents of objects to be processed and production equipment, the internal states of the production equipment set before the start of processing, processing result data on some of objects to be processed obtained after processing, and the checking results respectively. CONSTITUTION: A knowledge definition system 61 sets an upper limit value, lower limit value and an equipment operation parameter calculation function in order to decide the past processing steps, the processing result data items and the reference value, and the propriety for change of the equipment operation parameters for every equipment operation parameter. An equipment group control system 41 acquires the set information from the system 61 and also acquires the past processing result data items and the data value of the past checking result data items from a host system 51. The data value, the upper limit value and the lower limit value are compared with each other in the system 41. When the equipment operation parameter must be changed, the equipment operation parameter value is calculated based on the set information and the data value and then instructed to the production equipments.</p> |
