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发明名称
摘要
申请公布号	JP2002528673(A)	申请公布日期	2002.09.03
申请号	JP20000578557	申请日期	1999.07.20
申请人		发明人
分类号	F02M51/06;F02M61/08;F02M61/16;F02M63/00;H01L41/083;H01L41/09;(IPC1-7):F02M51/06	主分类号	F02M51/06
代理机构		代理人
主权项
地址

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