发明名称 Method for forming solder bumps for flip-chip bonding by using perpendicularly laid masking strips
摘要 A method for forming solder bumps for a flip-chip bonding process wherein the bumps have substantially the same height and structures formed by the method are described. In the method, a pre-processed semiconductor substrate that has a plurality of metal traces formed on a top surface is first provided. At least two solder non-wettable masking strips are then deposited on top of and perpendicular to the plurality of metal traces. The at least two solder non-wettable masking strips are deposited spaced-apart at a predetermined spacing sufficient for forming a bond pad therein-between on the plurality of metal traces. Finally, a solder material is deposited onto the bond pads forming solder bumps which are then reflown into solder balls.
申请公布号 US6444561(B1) 申请公布日期 2002.09.03
申请号 US20000677491 申请日期 2000.10.02
申请人 INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE 发明人 WANG CHIA-CHUNG;CHANG CHUNG-TAO;CHEN KUO-CHUAN
分类号 H01L21/48;H01L21/60;H05K3/34;(IPC1-7):H01L21/44 主分类号 H01L21/48
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