发明名称 |
Micromachined two dimensional array of piezoelectrically actuated flextensional transducers |
摘要 |
A transducer suitable for ultrasonic applications, fluid drop ejection and scanning force microscopy. The transducer comprises a thin piezoelectric ring bonded to a thin fully supported clamped membrane. Voltages applied to said piezoelectric ring excite axisymmetric resonant modes in the clamped membrane.
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申请公布号 |
US6445109(B2) |
申请公布日期 |
2002.09.03 |
申请号 |
US20010795812 |
申请日期 |
2001.02.27 |
申请人 |
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY |
发明人 |
PERCIN GOEKHAN;KHURI-YAKUB BUTRUS THOMAS |
分类号 |
B05B17/00;B05B17/06;B41J2/14;B41J2/16;(IPC1-7):H01L41/08 |
主分类号 |
B05B17/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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