发明名称 Method for fabricating bipolar transistors
摘要 In accordance with the invention, a bipolar transistor is fabricated by disposing a sacrificial layer over the conventional semiconductor workpiece. The sacrificial layer is patterned into a stripe corresponding to the emitter stripe, and the base contacts are formed in relation to the sacrificial stripe. The stripe is removed, and the base and emitter are formed. In the preferred embodiment, the sacrificial layer is a stack of layers providing etch selectivity.
申请公布号 US6444536(B2) 申请公布日期 2002.09.03
申请号 US19990349538 申请日期 1999.07.08
申请人 AGERE SYSTEMS GUARDIAN CORP. 发明人 WYLIE IAN WAKEFIELD
分类号 H01L21/331;H01L21/8249;(IPC1-7):H01L21/331 主分类号 H01L21/331
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