发明名称 Formation of nanometer-size wires using infiltration into latent nuclear tracks
摘要 Nanometer-size wires having a cross-sectional dimension of less than 8 nm with controllable lengths and diameters are produced by infiltrating latent nuclear or ion tracks formed in trackable materials with atomic species. The trackable materials and atomic species are essentially insoluble in each other, thus the wires are formed by thermally driven, self-assembly of the atomic species during annealing, or re-crystallization, of the damage in the latent tracks. Unlike conventional ion track lithography, the inventive method does not require etching of the latent tracks.
申请公布号 US6444256(B1) 申请公布日期 2002.09.03
申请号 US19990441113 申请日期 1999.11.17
申请人 THE REGENTS OF THE UNIVERSITY OF CALIFORNIA 发明人 MUSKET RONALD G.;FELTER THOMAS E.
分类号 H01L21/3115;H01L21/768;(IPC1-7):B05D5/12 主分类号 H01L21/3115
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