发明名称 |
Flexible silicon strain gage |
摘要 |
A generally flexible strain gage comprising a strain sensing element, and a generally flexible substrate supporting the strain sensing element. The strain sensing element is made of single crystal or polycrystalline semiconducting material. The invention also includes a method for forming a generally flexible strain gage comprising the step of selecting a wafer having a portion of a base material and portion of a single crystal or polycrystalline semiconducting material located thereon. The method further comprises the steps of etching a strain sensing element out of the semiconducting material and forming a generally flexible substrate onto said sensing element.
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申请公布号 |
US6444487(B1) |
申请公布日期 |
2002.09.03 |
申请号 |
US19990245272 |
申请日期 |
1999.02.05 |
申请人 |
ROSEMOUNT AEROSPACE INC. |
发明人 |
BOGGS BRADLEY J.;JUST MARCUS S.;STARK KEVIN C.;BANG CHRISTOPHER A. |
分类号 |
G01L1/18;G01L1/22;G01L9/00;H01L29/84;(IPC1-7):H01L21/00 |
主分类号 |
G01L1/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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