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发明名称
摘要
申请公布号
JP3320275(B2)
申请公布日期
2002.09.03
申请号
JP19950242316
申请日期
1995.08.29
申请人
发明人
分类号
G03F7/20;G03F9/00;H01L21/027;(IPC1-7):H01L21/027
主分类号
G03F7/20
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代理人
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