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发明名称
摘要
申请公布号	JP3320742(B2)	申请公布日期	2002.09.03
申请号	JP19980516105	申请日期	1997.09.09
申请人		发明人
分类号	H01L27/10;H01L21/822;H01L21/8242;H01L21/8246;H01L27/04;H01L27/105;H01L27/108;H01L27/115;(IPC1-7):H01L27/105;H01L21/824	主分类号	H01L27/10
代理机构		代理人
主权项
地址

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