METHOD FOR EVALUATING IMAGING PERFORMANCE OF CHARGED PARTICLE BEAM EXPOSURE APPARATUS AND CHARGED PARTICLE BEAM EXPOSURE APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method for evaluating an imaging performance of a charged particle beam exposure apparatus having an advantage capable of accurately measuring a distribution of a beam blur at many measuring positions in a sub-field and the charged particle beam exposure apparatus capable of being applied by the method. SOLUTION: A beam limiting opening 5 is disposed under a knife edge-like reference mark 1. An opening diameter of the limiting opening 5 is 50μm or less (preferably about 10μm). A distance (h) between the opening 5 and the reference mark 1 is a size slightly larger than a converging angle of a rectangular beam EB1 at a projection lens 15 of a lower stage at an expecting angle of an opening edge 5a from the mark 1. Most of a forward scattering electron e2 of the measuring beam EB1 and a forward scattering electron e2' of a dummy beam EB2 are shielded. Accordingly, almost only non-scattering electron e1 is detected by an electron detector 5 under the opening 5.