发明名称 MANUFACTURING METHOD OF SEMICONDUCTOR CHIP AND SEMICONDUCTOR WAFER
摘要 PROBLEM TO BE SOLVED: To prevent deterioration in the mechanical strength of a semiconductor chip, when manufacturing a rectangular semiconductor chip having different dimensions in height and width. SOLUTION: When the semiconductor chip is to be formed by dividing from a semiconductor wafer, the chip is aligned and arranged so that the shot side of a semiconductor device section is set along a direction which is parallel with the crystal orientation <01-1>, and the chip is formed so that the width of a division region along the short side of the semiconductor device section is narrower than that of a division region, along the long side of the semiconductor device section.
申请公布号 JP2002246334(A) 申请公布日期 2002.08.30
申请号 JP20010040320 申请日期 2001.02.16
申请人 MURATA MFG CO LTD 发明人 KANAE MASAAKI
分类号 H01L21/301;H01L21/304;H01L21/48;H01L21/784;H01L29/04;H01L31/036;(IPC1-7):H01L21/301 主分类号 H01L21/301
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