ORGANIC EL DEVICE AND MANUFACTURING METHOD FOR THE SAME,申请号JP20010038808-传众专利搜索

发明名称	ORGANIC EL DEVICE AND MANUFACTURING METHOD FOR THE SAME
摘要	PROBLEM TO BE SOLVED: To reduce the occurrence of short circuit defects without having to greatly increase the manufacturing cost. SOLUTION: When an ITO is etched, amorphous carbon is deposited at the same time, and an amorphous carbon film 103 is formed in the ITO film etched part, that is, in a clearance between lower electrodes 101a formed in this process.
申请公布号	JP2002246173(A)	申请公布日期	2002.08.30
申请号	JP20010038808	申请日期	2001.02.15
申请人	NEC CORP	发明人	TADA HIROSHI;ODA ATSUSHI;ISHIKAWA HITOSHI;AZUMAGUCHI TATSU
分类号	H05B33/10;H01L21/302;H01L21/3065;H01L27/32;H01L51/50;H01L51/56;H05B33/22;(IPC1-7):H05B33/10;H01L21/306;H05B33/14	主分类号	H05B33/10
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