| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat treating method with which the warpage deformation of a body to be treated at elevating of temperature of the body to be treated is prevented, without lowering the throughput. SOLUTION: In this heat treating method, the body W to be treated is mounted on a mounting base 24, installed inside a treatment container 14 capable of being evacuated, the temperature of the body to be treated is elevated to a prescribed temperature, and a prescribed heat treatment is executed. The temperature of the body to be treated is elevated in a state with the body to be treated being provided with temperature distribution in which the temperature of the center part of the body to be treated is high, and the temperature of a peripheral edge part is low. Thus, the warpage deformation of the body to be treated at temperature elevation of the body to be treated is prevented, without lowering the throughput.
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