| 摘要 |
PROBLEM TO BE SOLVED: To provide an optically controlled semiconductor switch capable of changing over outputting/breaking of a high-frequency signal in accordance with an optical signal with a low cost. SOLUTION: This optically controlled semiconductor switch 1 comprises a Si substrate 2, an optical fiber 3, and a semiconductor substrate 4. High-frequency transmission lines 6, 7, which connect an electrical-signal input terminal P1 to an electrical-signal output terminal P2, are formed on the Si substrate 2, while the optical fiber 3 is fixed in a V-groove 2a formed on the upper face of the Si substrate 2. In the semiconductor substrate 4 mounted on the Si substrate 2 via bumps 8, a HEMT 16 is formed. The operation characteristics of the HEMT 16 is changed with an optical signal from the optical fiber 3 to pass or cut the electrical signal of a specified frequency band among electrical signals inputted from the electrical-signal input terminal P1 on the way between the high-frequency lines 6 and 7.
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