发明名称 HORIZONTAL JUNCTION FIELD EFFECT TRANSISTOR AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a horizontal JFET having a structure, with which on- resistance can be reduced while a high voltage breakdown performance is maintained, and to provide a method of manufacturing the same. SOLUTION: This horizontal JFET includes a first conductivity-type gate layer 2 on a semiconductor substrate, a second conductivity-type semiconductor layer 3a positioned on the first conductivity-type gate layer, a second conductivity-type source region 5 formed so as to sandwich a channel region 7 on the second conductivity-type semiconductor layer on a plane and a second conductivity-type drain region 6. The gap between the first conductivity-type gate layer 2 and the second conductivity-type source region 5 is smaller than the gap between the first conductivity-type gate layer 2 and the second conductivity-type drain region 6.
申请公布号 JP2002246399(A) 申请公布日期 2002.08.30
申请号 JP20010039760 申请日期 2001.02.16
申请人 SUMITOMO ELECTRIC IND LTD 发明人 HARADA MAKOTO
分类号 H01L29/808;H01L21/337;(IPC1-7):H01L21/337 主分类号 H01L29/808
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