发明名称 SEMICONDUCTOR WAFER DIVIDING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor wafer dividing method for exactly dividing a semiconductor wafer at desired positions. SOLUTION: Notching 12 is made at a desired position on the end face of the semiconductor wafer 10. Then, on the back of the semiconductor wafer 10, a rod-like member 20 is arranged nearly in parallel in the direction where the notching 12 has been made. After that, a load substantially equal is applied to both the sides of the rod-like member 20 from the front to back sides of the semiconductor wafer 10, thus dividing the semiconductor wafer 10.
申请公布号 JP2002246335(A) 申请公布日期 2002.08.30
申请号 JP20010043878 申请日期 2001.02.20
申请人 UMC JAPAN 发明人 SHIGETA SHINOBU
分类号 H01L21/301;(IPC1-7):H01L21/301 主分类号 H01L21/301
代理机构 代理人
主权项
地址