| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate transfer apparatus, in which the transfer of a substrate can be sensed easily and reliably, by expanding the range of movement of a sensing means for sensing the transfer of the substrate so as to move the means to an arbitrary position. SOLUTION: In a substrate transfer apparatus 7, provided with a conveyer 9 for transferring an electronic circuit substrate on which electronic component are mounted, sensing means 13 for sensing the substrate is provided on at least either an end 12a at carry-in side or an end 12b at carry-out side of the substrate. The means 13 is provided so as to be movable from the upper end of the conveyer 9 to the front side or rear side in the transfer direction outside the end of the conveyer 9. Furthermore, the means 13 is provided so as to be movable in the direction approximately along the transfer direction of the conveyer 9, in the arc direction, around a prescribed range and in the radial direction approximately specified as being the center by the center of the arc direction respectively. |
