| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate transfer system of high versatility, without imposing load on the central controllers of respective devices which transfer a substrate. SOLUTION: Since the respective central controllers 209 and 110 regulate the access of the transfer devices 126 and 207 to an instage 202 by signals which are synchronously and simultaneously outputted from a stage sensor 205 and first and second access sensors 206 and 208, load is not imposed on the central controllers 209 and 210. Since such a control can be performed by turning on/off the signals, versatility becomes very high. |
