| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a solid-state image pickup element in which condensing efficiency with an in-layer lens is improved. SOLUTION: There are provided a process where a light receiving part 2 and a charge transfer part 3 are formed at a surface layer of a substrate 1, a process where a transfer electrode 5 is formed on the charge transfer 3 through a gate insulating film 4, a process where a light shielding film 7 is so formed as to cover the transfer electrode 5, a process where a first insulating film 8a is formed so that the light shielding film 7 and the light receiving part 2 are covered while a recessed part is formed on the light receiving part 2, a process where the first insulating film 8a is reflow-processed so that a shape of the recessed part is processed into a lens shape, a process where a second insulating film 8b is so formed that the first insulating film 8a is covered while a lens-like recessed part is formed on the light receiving part 2, a process where a transparent material film 9 is formed on the second insulating film 8b, and a process where a surface of the transparent material film 9 is flattened.
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