| 摘要 |
PURPOSE: A prism coupler device and a method for controlling the same are provided to measure the thickness and refraction rate in the range from below 1 micro m to 15 micro m in a simple manner without any destruction by using laser beams and optical parts. CONSTITUTION: A prism coupler device includes a light source(20) for projecting helium-neon laser beams with main wavelength of 632.8nm, a polarizer(21) for making the polarization state of the light source to TE or TM mode, a beam splitter(22) and an orifice(23) mounted between the polarizer and a prism(10) for assigning a zero point of synchronous angles, a rotary stage(26) to be driven for changing the synchronous angle, a controller(27) for driving a micro step motor, an input/output interface(28) for the telecommunication between a computer(29) and the controller, the computer for controlling the previous operations entirely, and an ADC board interposed between a detector(25') connected to the beam splitter and the computer.
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