发明名称 |
RESIN COMPOSITION FOR ALKALI DEVELOPABLE RESIST, DRY FILM AND RESIST COMPRISING THEIR CURED BODY |
摘要 |
PROBLEM TO BE SOLVED: To provide a resin composition for an alkali developable resist excellent in heat, printing and wear resistances while retaining sensitivity and resolution and capable of exhibiting superior dielectric property and to provide a dry film and a resist comprising their cured body. SOLUTION: The resin composition contains a copolymer (A) consisting of repeating structural units of formula (1) and repeating structural units having an acid group and a polymerizable monomer (B). In the formula, X1 is a 3-8C branched alkyl or substituted branched alkyl or a 4-8C cycloalkyl or substituted cycloalkyl and Y1 a 3-8C branched alkyl or substituted branched alkyl or a 4-8C cycloalkyl or substituted cycloalkyl. |
申请公布号 |
JP2002244293(A) |
申请公布日期 |
2002.08.30 |
申请号 |
JP20010046465 |
申请日期 |
2001.02.22 |
申请人 |
NOF CORP |
发明人 |
OKUO MASAMI;KATO YUKIHIRO |
分类号 |
G03F7/033;C08F2/46;C08F267/06;G03F7/004;G03F7/027;H05K3/00 |
主分类号 |
G03F7/033 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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