| 摘要 |
PROBLEM TO BE SOLVED: To provide a device fabricating system in which the operational cost is reduced, the time elapsing before a gas impeding the work has a low concentration is shortened and the maintenance time is shortened. SOLUTION: The device fabricating system comprises means for supplying mixture gas (ozone, nitrogen, and the like) to the projection optical system 5 in the device fabricating system including a pump section 10, an ozone generator 12, an ozone generating lamp 11 and piping 14a, 14b, means for varying the flow rate of the mixture gas depending on the operating state of an aligner, and/or mean for varying the compositional ratio of the mixture gas including an system control section 8, a mixture gas control section 9 and a lamp power supply section 7.
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