发明名称 MOTOR DEVICE, STAGE DEVICE, AND ALIGNER
摘要 PROBLEM TO BE SOLVED: To reduce fluctuations of temperatures of a motor, objects driven by the motor, and their environment. SOLUTION: Even while objects (W, 12, and 18) driven by a motor 38Y are in stationary states, the drive of the motor is maintained by control means (20 and 70Y) so as not to cause the movements of the objects. As a current is supplied to the motor, therefore, even if the objects are in the stationary states, the motor generates heat. That is, as fluctuations between temperatures when the objects are moved and the temperatures when the objects are in the stationary states can be suppressed, the fluctuations of the temperatures of the motor, objects driven by the motor, and their environment can be reduced.
申请公布号 JP2002247891(A) 申请公布日期 2002.08.30
申请号 JP20010041163 申请日期 2001.02.19
申请人 NIKON CORP 发明人 TAKAHASHI AKIRA
分类号 G03F7/20;G03F7/22;H01L21/027;H02P7/29;(IPC1-7):H02P7/29 主分类号 G03F7/20
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