| 摘要 |
PROBLEM TO BE SOLVED: To provide an insulator as the insulation layer in a multilayered body in which generation of dust is suppressed at usage time, more specifically, an electronic circuit component applied with the insulator, especially a wireless suspension. SOLUTION: The insulator, comprising one or more insulation unit layer and being etched by a wet process, is subjected to heat treatment following wet etching. The insulator exists principally as a multilayer insulation layer of a first inorganic substance layer - an insulation layer - a second inorganic substance layer or of an inorganic substance layer - an insulation layer, where the inorganic substance layer is removed at least partially, to expose the insulation layer.
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