发明名称 METHOD OF MANUFACTURING ELECTRONIC COMPONENT AND ALIGNER FOR USED IN THIS
摘要 PROBLEM TO BE SOLVED: To provide an aligner for solving the problem that the accuracy of a transfer of a circuit patter is enhanced in a method of dipping a material to be treated into a developing solution like conventional methods, but the developing solution is needed in large quantities and the method lacks in the mass productivity of the material to be treated. SOLUTION: An aligner is constituted in such a structure that a developing solution is fed to the main surface on one side of the main surfaces of a material to be treated to turn the material to be treated paddled and the material to be treated is intermittingly rotated as the material to be treated keeps paddled.
申请公布号 JP2002246288(A) 申请公布日期 2002.08.30
申请号 JP20010039829 申请日期 2001.02.16
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 HATTORI TAKAMICHI;MATSUI ATSUSHI;TAKEYAMA SUSUMU;YAMASHITA KIYOHARU;FURUKAWA MITSUHIRO
分类号 G03F7/30;H01L21/027;(IPC1-7):H01L21/027 主分类号 G03F7/30
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