发明名称 |
METHOD OF MANUFACTURING ELECTRONIC COMPONENT AND ALIGNER FOR USED IN THIS |
摘要 |
PROBLEM TO BE SOLVED: To provide an aligner for solving the problem that the accuracy of a transfer of a circuit patter is enhanced in a method of dipping a material to be treated into a developing solution like conventional methods, but the developing solution is needed in large quantities and the method lacks in the mass productivity of the material to be treated. SOLUTION: An aligner is constituted in such a structure that a developing solution is fed to the main surface on one side of the main surfaces of a material to be treated to turn the material to be treated paddled and the material to be treated is intermittingly rotated as the material to be treated keeps paddled. |
申请公布号 |
JP2002246288(A) |
申请公布日期 |
2002.08.30 |
申请号 |
JP20010039829 |
申请日期 |
2001.02.16 |
申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
HATTORI TAKAMICHI;MATSUI ATSUSHI;TAKEYAMA SUSUMU;YAMASHITA KIYOHARU;FURUKAWA MITSUHIRO |
分类号 |
G03F7/30;H01L21/027;(IPC1-7):H01L21/027 |
主分类号 |
G03F7/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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