| 摘要 |
PROBLEM TO BE SOLVED: To provide the manufacturing method of a superconducting electronic device for composing a compact integrated circuit. SOLUTION: The manufacturing method comprises a process for fixing a BSCCO single crystal 2 that is cleaved on a substrate 1, a process for etching the BSCCO single crystal up to a specific depth by first ion milling 4 using a first photoresist 3, a process for forming an inherent Josephson junction device by performing second ion milling 6 using a second photoresist 5, a process for cleaving the inherent Josephson junction device for obtained a BSCCO single crystal piece 7 that has been turned over, a process for fixing the BSCCO single crystal piece 7 on a new substrate 8 and patterning the BSCCO single crystal device by third ion milling 10 using a third photoresist 9, and a process for obtaining a superconducting electronic device by forming lower and upper electrodes 11 and 12.
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