发明名称 SHUTTER, LIGHT SOURCE AND ALIGNER
摘要 PROBLEM TO BE SOLVED: To prevent deformation and damage due to heating of a reflector for regulating the quantity of exposure or altering the optical path. SOLUTION: A heat ray reflection filter 50 is inserted before illumination light from a light source 1 reaches a shutter blade 4 in a shutter chamber 61 through a window glass 51 in order to reduce the heat rays reaching the shutter blade 4 thus reducing heat shock onto the shutter face. In such a light source, incident angle of illumination light impinging on the filter 50 is made uniform thus stabilizing the optical characteristics of the filter 50.
申请公布号 JP2002246282(A) 申请公布日期 2002.08.30
申请号 JP20010036665 申请日期 2001.02.14
申请人 CANON INC 发明人 KAWAHARA NOBUMICHI
分类号 G03F7/20;H01L21/027;(IPC1-7):H01L21/027 主分类号 G03F7/20
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