| 摘要 |
A method and a device for cleaning a ceramics member capable of efficiently cleaning deposit in a short time without providing a damage to the surface of the ceramics member; the method, comprising the steps of disposing the ceramics member having the deposit adhered onto the surface thereof in a cleaning tank, increasing a temperature inside the cleaning tank for a specified time, continuously leading oxygen into the cleaning tank while continuously ventilating the inside of the cleaning tank, and causing an oxidation reduction reaction on the deposit adhered onto the surface of the ceramics member to clean out the deposit; the method and device being more effective when aluminum chloride, aluminum fluoride, or both thereof are adhered onto the surface of an aluminum ceramics member.
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