发明名称 |
FILM ODER BESCHICHTUNG AUF EINER UNTERLAGE |
摘要 |
<p>A method of depositing a material onto a substrate, comprising the steps of: feeding a material solution to an outlet to provide a stream of droplets of the material solution; applying a potential difference between the outlet and a substrate to electrostatically attract the droplets from the outlet towards the substrate such that a corona discharge is formed around the outlet; heating the substrate to provide an increase in temperature between the outlet and the substrate; and progressively increasing the temperature of the substrate during material deposition.</p> |
申请公布号 |
DE69806757(D1) |
申请公布日期 |
2002.08.29 |
申请号 |
DE1998606757 |
申请日期 |
1998.05.28 |
申请人 |
IMPERIAL COLLEGE OF SCIENCE, TECHNOLOGY & MEDICINE |
发明人 |
CHOY, KWANG-LEONG;BAI, WEI |
分类号 |
C23C26/00;B05B5/08;B05D1/04;C23C4/12;C23C16/448;(IPC1-7):C23C16/452;C23C16/52 |
主分类号 |
C23C26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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