发明名称 SINGULATION APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTORS
摘要 <p>A method and apparatus are provided for singulating semiconductor devices from a strip containing a plurality of semiconductor devices. A singulation saw chuck is also provided. The method includes the steps of making isolation cuts part way through the strip of semiconductor devices, inverting the strip onto a saw chuck with barriers that mate with the isolation cuts, and making singulation cuts that match the isolation cuts to completely separate the individual semiconductor devices.</p>
申请公布号 WO2002067300(A2) 申请公布日期 2002.08.29
申请号 US2002005335 申请日期 2002.02.20
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