A MODULAR CONTROL SYSTEM AND METHOD FOR A CMP TOOL

摘要

A system and method for an automated chemical mechanical planarization (CMP) machine. The system comprises a plurality of interchangeable CMP process modules. Each module is a compilation of grouped software codes called "objects". Process modules may be added or deleted from the system as needed, whether during the machine's assembly or during actual use. The system is configured to allow users to input a process "recipe" for each wafer of a wafer cassette which will guide the system to process the wafer in a desired way.