| 摘要 |
Provide an integration unit, wherein the does not take part mutually, the reliability becomes an independent one of individual seal portions, improving the reliability than the related art. An integration unit composed by integrating a plurality of control equipments 10a, 10b, and connecting a flow channel of one control equipment 10a with a flow channel of the other control equipment 10b, wherein a single holding member 11a is disposed in correspondence to one flow channel of the control equipment 10a, and the holding member 11a is fixed only to the corresponding control equipment 10a and not fixed to the other control equipment 10b. A holding member of the control equipment for the integration unit made of beams and boss portions, wherein the inside is hollow.
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