发明名称 |
DIAMANTAEHNLICHE NANOKOMPOSIT-ZUSAMMENSETZUNGEN |
摘要 |
The invention relates to an improved diamond-like nanocomposite composition comprising networks of a-C:H and a-Si:O wherein the H-concentration is between 40% and 80% of the C-concentration and having a coefficient of friction against steel which is smaller than 0.1 in air with a relative humidity up to 90%, or in water. The invention relates also to a process for depositing the composition on a substrate in a vacuum chamber. The composition comprises preferably 30 to 70 at % of C, 20 to 40 at % of H, 5 to 15 at % of Si and 5 to 15 at % of O and can be doped with transition metals. |
申请公布号 |
DE69710324(T2) |
申请公布日期 |
2002.08.29 |
申请号 |
DE1997610324T |
申请日期 |
1997.04.11 |
申请人 |
N.V. BEKAERT S.A., ZWEVEGEM |
发明人 |
NEERINCK, DOMINIQUE;GOEL, ARVIND |
分类号 |
C01B31/02;C01B31/00;C01B33/00;C23C16/26;C23C16/30;C23C16/50;C23C16/503;C23C30/00;(IPC1-7):C23C16/30 |
主分类号 |
C01B31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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